High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography.

导出 OA

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作者： Daehan,Yoo ^[1] ; Ngoc-Cuong,Nguyen ^[2] ; Luis,Martin-Moreno ^[3] ; Daniel A,Mohr ^[1] ; Sol,Carretero-Palacios ^[4] ; Jonah,Shaver ^[1] ; Jaime,Peraire ^[2] ; Thomas W,Ebbesen ^[5] ; Sang-Hyun,Oh ^[1]

作者单位： Department of Electrical and Computer Engineering, University of Minnesota , Minneapolis, Minnesota 55455, United States. ^[1] Department of Aeronautics and Astronautics, Massachusetts Institute of Technology , Cambridge, Massachusetts 02139, United States. ^[2] Instituto de Ciencia de Materiales de Aragón and Departamento de Física de la Materia Condensada, CSIC-Universidad de Zaragoza , E-50009 Zaragoza, Spain. ^[3] Instituto de Ciencia de Materiales de Sevilla, CSIC-Universidad de Sevilla , 41092 Sevilla, Spain. ^[4] ISIS, University of Strasbourg and CNRS , 67000 Strasbourg, France. ^[5]

关键词 Coaxial nanohole atomic layer lithography epsilon-near-zero metamaterial extraordinary optical transmission glancing-angle ion milling slow light

主题词金(Gold);光(Light);纳米结构(Nanostructures);纳米技术(Nanotechnology);光学和光子学(Optics and Photonics)

DOI 10.1021/acs.nanolett.6b00024

PMID 26910363

发布时间 2020-09-30

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