Electrochemical nanoimprint lithography: when nanoimprint lithography meets metal assisted chemical etching.
第一作者:
Jie,Zhang
第一单位:
State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Collaborative Innovation Center of Chemistry for Energy Materials (iChEM), and Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China. dpzhan@xmu.edu.cn.
作者:
DOI
10.1039/c7nr01777d
PMID
28530294
发布时间
2018-07-20
- 浏览6

Nanoscale
7476-7482页
相似文献
- 中文期刊
- 外文期刊
- 学位论文
- 会议论文