作者单位:
Key Laboratory of Microsystems and Microstructures Manufacturing, Micro/Nanotechnology Research Center, Harbin Institute of Technology, Yikuangjie 2, Harbin, 150080, China.
[1]
Key Laboratory of Microsystems and Microstructures Manufacturing, Micro/Nanotechnology Research Center, Harbin Institute of Technology, Yikuangjie 2, Harbin, 150080, China. zhiguangwu@hit.edu.cn.
[2]
Max Planck Institute for Intelligent Systems, Heisenbergstrasse 3, 70569, Stuttgart, Germany. zhiguangwu@hit.edu.cn.
[3]
Key Laboratory of Microsystems and Microstructures Manufacturing, Micro/Nanotechnology Research Center, Harbin Institute of Technology, Yikuangjie 2, Harbin, 150080, China. qianghe@hit.edu.cn.
[4]
DOI
10.1038/s41598-017-04908-x
PMID
28676666
发布时间
2018-12-28