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High Reflectance Nanoscale V/Sc Multilayer for Soft X-ray Water Window Region.

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第一作者: Qiushi,Huang
第一单位: Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China.
作者: Qiushi,Huang [1] ; Qiang,Yi [2] ; Zhaodong,Cao [3] ; Runze,Qi [1] ; Rolf A,Loch [4] ; Philippe,Jonnard [5] ; Meiyi,Wu [5] ; Angelo,Giglia [6] ; Wenbin,Li [1] ; Eric,Louis [7] ; Fred,Bijkerk [7] ; Zhong,Zhang [1] ; Zhanshan,Wang [8]
作者单位: Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China. [1] Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics, Mianyang, 621900, China. [2] Shanghai Institute of Laser Plasma, China Academy of Engineering Physics, Shanghai, China. [3] The Max Planck Institute for the Structure and Dynamics of Matter, Center for Free Electron Laser Science, LuruperChaussee 149, Hamburg, 22761, Germany. [4] Sorbonne Universités, UPMC Univ Paris 06, Laboratoire de Chimie Physique-Matière et Rayonnement, 11 Rue Pierre et Marie Curie, F-75231, Paris Cedex 05, Paris, France.;CNRS UMR 7614, Laboratoire de Chimie Physique-Matière et Rayonnement, 11 Rue Pierre et Marie Curie, F-75231, Paris Cedex 05, Paris, France. [5] CNR Istituto Officina Materiali, 34149, Trieste, Italy. [6] Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE, Enschede, The Netherlands. [7] Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai, 200092, China. wangzs@tongji.edu.cn. [8]
DOI 10.1038/s41598-017-13222-5
PMID 29018232
发布时间 2019-11-20
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