Optical Diagnostics in the Gaseous Electronics Conference Reference Cell.

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第一作者： G A,Hebner

第一单位： Sandia National Laboratories, Dept. 1128, MS 1423, Albuquerque, NM 87185.

作者： G A,Hebner ^[1] ; K E,Greenberg ^[2]

作者单位： Sandia National Laboratories, Dept. 1128, MS 1423, Albuquerque, NM 87185. ^[1] University of New Mexico, Department of Chemical and Nuclear Engineering, Albuquerque, NM 87131. ^[2]

关键词 Gaseous Electronics Conference Reference Cell absorption argon discharge electric field helium laser-induced fluorescence metastable parallel plate plasma processing radio frequency

DOI 10.6028/jres.100.028

PMID 29151748

发布时间 2019-11-20

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Journal of research of the National Institute of Standards and Technology

373-382页

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Optical Diagnostics in the Gaseous Electronics Conference Reference Cell.

Journal of research of the National Institute of Standards and Technology

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Optical Diagnostics in the Gaseous Electronics Conference Reference Cell.

Journal of research of the National Institute of Standards and Technology

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Journal of research of the National Institute of Standards and Technology

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