第一单位：
State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. suyan16@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. suyan16@semi.ac.cn.
作者单位：
State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. suyan16@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. suyan16@semi.ac.cn.
[1]
State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. tongxin16@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. tongxin16@semi.ac.cn.
[2]
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. liunan16@semi.ac.cn.;Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. liunan16@semi.ac.cn.
[3]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. hangw1984@semi.ac.cn.
[4]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. schw@semi.ac.cn.
[5]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. ningjin@semi.ac.cn.;State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China. ningjin@semi.ac.cn.;School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China. ningjin@semi.ac.cn.
[6]
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. lizhaofeng@semi.ac.cn.;School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China. lizhaofeng@semi.ac.cn.
[7]
State Key Laboratory of Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. fhyang@semi.ac.cn.;School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China. fhyang@semi.ac.cn.
[8]
DOI
10.3390/s18041006
PMID
29597284
发布时间
2024-03-14
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