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Six Degrees of Freedom Displacement Measurement System for Wafer Stage Composed of Hall Sensors.

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第一作者： Bo,Zhao

第一单位： School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. hitzhaobo@hit.edu.cn.

作者： Bo,Zhao ^[1] ; Weijia,Shi ^[2] ; Jiawei,Zhang ^[3] ; Ming,Zhang ^[4] ; Xue,Qi ^[5] ; Jiaxin,Li ^[6] ; Feng,Li ^[7] ; Jiubin,Tan ^[8]

作者单位： School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. hitzhaobo@hit.edu.cn. ^[1] School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. shiweijia@hit.edu.cn. ^[2] School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. hit_zhangjiawei@163.com. ^[3] School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. 17S001042@stu.hit.edu.cn. ^[4] School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. 17S001051@stu.hit.edu.cn. ^[5] School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. 1140110416@hit.edu.cn. ^[6] School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. 1140110428@hit.edu.cn. ^[7] School of Electrical Engineering and Automation, Harbin Institute of Technology, D-403 Science Park, 2 Yikuang Street, Harbin 150080, China. jbtan@hit.edu.cn. ^[8]

关键词 Hall sensor displacement measurement ellipsoid function the least squares method

DOI 10.3390/s18072030

PMID 29941825

发布时间 2018-11-14

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