作者单位:
Key Laboratory of Micro/Nano Systems for Aerospace of Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, Shaanxi, China. liyq@nwpu.edu.cn.
[1]
Key Laboratory of Micro/Nano Systems for Aerospace of Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, Shaanxi, China. zgwang@mail.nwpu.edu.cn.
[2]
Key Laboratory of Micro/Nano Systems for Aerospace of Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, Shaanxi, China. xiaoc@mail.nwpu.edu.cn.
[3]
Beijing Changcheng Institute of Metrology & Measurement, Beijing 100095, China. zhao_711148@163.com.
[4]
Key Laboratory of Micro/Nano Systems for Aerospace of Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, Shaanxi, China. yaxin_zhu@engineering.ucla.edu.
[5]
Chinese Aeronautical Establishment, Chaoyang District, Beijing 100029, China. Zhouzili304@sina.com.
[6]
DOI
10.3390/s18082420
PMID
30044446
发布时间
2018-11-14