Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review.

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第一作者： Changtao,Wang

第一单位： State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. wangct@ioe.ac.cn.

作者： Changtao,Wang ^[1] ; Wei,Zhang ^[2] ; Zeyu,Zhao ^[3] ; Yanqin,Wang ^[4] ; Ping,Gao ^[5] ; Yunfei,Luo ^[6] ; Xiangang,Luo ^[7]

作者单位： State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. wangct@ioe.ac.cn. ^[1] State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. zhaocw@ioe.ac.cn. ^[2] State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. zhaozy@ioe.ac.cn. ^[3] State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. wangyq@ioe.ac.cn. ^[4] State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. gaop@ioe.ac.cn. ^[5] State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. luoyf@ioe.ac.cn. ^[6] State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China. lxg@ioe.ac.cn. ^[7]

关键词 bulk plasmon polaritons diffraction limit metamaterial nano optical lithography nanostructure fabrication near-field optics subwavelength optics super resolution surface plasmon polaritons

DOI 10.3390/mi7070118

PMID 30404291

发布时间 2020-09-30

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