The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography.

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第一作者： Jun,Wu

第一单位： Key Laboratory of Optoelectronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China. wdison@emails.bjut.edu.cn.

作者： Jun,Wu ^[1] ; Zhaoxin,Geng ^[2] ; Yiyang,Xie ^[3] ; Zhiyuan,Fan ^[4] ; Yue,Su ^[5] ; Chen,Xu ^[6] ; Hongda,Chen ^[7]

作者单位： Key Laboratory of Optoelectronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China. wdison@emails.bjut.edu.cn. ^[1] School of Information Engineering, Minzu University of China, Beijing 10083, China. zxgeng@muc.edu.cn. ^[2] Key Laboratory of Optoelectronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China. xieyiyang@bjut.edu.cn. ^[3] State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China. fanzhiyuan@semi.ac.cn. ^[4] State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China. suyue@semi.ac.cn. ^[5] Key Laboratory of Optoelectronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China. xuchen58@bjut.edu.cn. ^[6] State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductor, Chinese Academy of Sciences, Beijing 100083, China. hdchen@semi.ac.cn. ^[7]

关键词 PDMS laser interference lithograph periodic nanostructures

DOI 10.3390/nano9010073

PMID 30621058

发布时间 2020-10-01

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Nanomaterials (Basel, Switzerland)

2019年9卷1期

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The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography.

Nanomaterials (Basel, Switzerland)

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The Fabrication of Nanostructures on Polydimethylsiloxane by Laser Interference Lithography.

Nanomaterials (Basel, Switzerland)

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Nanomaterials (Basel, Switzerland)

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