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Fabrication of Antireflective Nanostructures on a Transmission Grating Surface Using a One-Step Self-Masking Method.

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第一作者： Ting,Shao

第一单位： Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China. shaot05@163.com.

作者： Ting,Shao ^[1] ; Feng,Tang ^[2] ; Laixi,Sun ^[3] ; Xin,Ye ^[4] ; Junhui,He ^[5] ; Liming,Yang ^[6] ; Wanguo,Zheng ^[7]

作者单位： Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China. shaot05@163.com. ^[1] Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China. tangfengf3@126.com. ^[2] Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China. sunlaixi@126.com. ^[3] Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China. xyecaep@mail.ustc.edu.cn. ^[4] Functional Nanomaterials Laboratory, Center for Micro/Nanomaterials and Technology and Key Laboratory of Photochemical Conversion and Optoelectronic Materials, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing 100190, China. jhhe@mail.ipc.ac.cn. ^[5] Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China. yanglcaep@163.com. ^[6] Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China. yehanwin@mail.ustc.edu.cn.;IFSA (Inertial Fusion Sciences and Applications) Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, China. yehanwin@mail.ustc.edu.cn. ^[7]

关键词 antireflection self-masking etching subwavelength structures transmission grating

DOI 10.3390/nano9020180

PMID 30717124

发布时间 2020-10-01

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Nanomaterials (Basel, Switzerland)

2019年9卷2期

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Fabrication of Antireflective Nanostructures on a Transmission Grating Surface Using a One-Step Self-Masking Method.

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Fabrication of Antireflective Nanostructures on a Transmission Grating Surface Using a One-Step Self-Masking Method.

Nanomaterials (Basel, Switzerland)

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