On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition.

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作者： Alberto,Perrotta ^[1] ; Julian,Pilz ^[1] ; Stefan,Pachmajer ^[1] ; Antonella,Milella ^[2] ; Anna Maria,Coclite ^[1]

作者单位： Institute of Solid State Physics, NAWI Graz, Graz University of Technology, Petersgasse 16, 8010 Graz, Austria. ^[1] Department of Chemistry, Università degli studi di Bari, Via E. Orabona 4, 70126, Bari, Italy. ^[2]

关键词 PE-ALD ZnO calcination porosity thin films

DOI 10.3762/bjnano.10.74

PMID 30993055

发布时间 2020-09-29

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Beilstein journal of nanotechnology

2019年10卷

746-759页

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On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition.

Beilstein journal of nanotechnology

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Beilstein journal of nanotechnology

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On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition.

Beilstein journal of nanotechnology

相似文献

Beilstein journal of nanotechnology

相关期刊

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