第一单位：
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. yangjian@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. yangjian@semi.ac.cn.
作者单位：
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. yangjian@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. yangjian@semi.ac.cn.
[1]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. schw@semi.ac.cn.
[2]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. hangw1984@semi.ac.cn.
[3]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. zhangmeng@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. zhangmeng@semi.ac.cn.
[4]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. ningjin@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. ningjin@semi.ac.cn.;State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China. ningjin@semi.ac.cn.
[5]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. ymzhao@semi.ac.cn.;Center of Materials Science and Optoelectronics Engineering，University of Chinese Academy of Sciences, Beijing 100049, China. ymzhao@semi.ac.cn.;College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China. ymzhao@semi.ac.cn.
[6]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. xdwang@semi.ac.cn.;School of microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China. xdwang@semi.ac.cn.;Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Beijing 100083, China. xdwang@semi.ac.cn.
[7]
DOI
10.3390/mi10040244
PMID
31013854
发布时间
2024-07-16
换一批
