第一单位：
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
作者单位：
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
[1]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. hangw1984@semi.ac.cn.
[2]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. schw@semi.ac.cn.
[3]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.;State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing 100083, China.
[4]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.;Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.;Beijing Academy of Quantum Information Science, Beijing 100083, China.
[5]
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. xdwang@semi.ac.cn.;Beijing Academy of Quantum Information Science, Beijing 100083, China. xdwang@semi.ac.cn.;School of microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China. xdwang@semi.ac.cn.;Beijing Engineering Research Center of Semiconductor Micro-Nano Integrated Technology, Beijing 100083, China. xdwang@semi.ac.cn.
[6]
DOI
10.3390/mi10090589
PMID
31489954
发布时间
2023-10-14
换一批
