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Development Trends and Perspectives of Future Sensors and MEMS/NEMS.

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第一作者： Jianxiong,Zhu

第一单位： Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore.;Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore.;Hybrid-Integrated Flexible (Stretchable) Electronic Systems Program, National University of Singapore, Singapore 117608, Singapore.;NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China.

作者： Jianxiong,Zhu ^[1] ; Xinmiao,Liu ^[2] ; Qiongfeng,Shi ^[1] ; Tianyiyi,He ^[1] ; Zhongda,Sun ^[2] ; Xinge,Guo ^[2] ; Weixin,Liu ^[2] ; Othman Bin,Sulaiman ^[2] ; Bowei,Dong ^[3] ; Chengkuo,Lee ^[3]

作者单位： Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore.;Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore.;Hybrid-Integrated Flexible (Stretchable) Electronic Systems Program, National University of Singapore, Singapore 117608, Singapore.;NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China. ^[1] Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore.;Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore.;Hybrid-Integrated Flexible (Stretchable) Electronic Systems Program, National University of Singapore, Singapore 117608, Singapore. ^[2] Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore.;Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore.;Hybrid-Integrated Flexible (Stretchable) Electronic Systems Program, National University of Singapore, Singapore 117608, Singapore.;NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China.;NUS Graduate School for Integrative Science and Engineering (NGS), National University of Singapore, Singapore 119077, Singapore. ^[3]

关键词 MEMS sensor artificial intelligence flexible sensor human-machine interface machine learning zero-power sensor

DOI 10.3390/mi11010007

PMID 31861476

发布时间 2024-03-28

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