Enhancement of Withstand Voltage in Silicon Strain Gauges Using a Thin Alkali-Free Glass.

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第一作者： Joon Hyub,Kim

第一单位： Department of Nanomechatronics Engineering, Pusan National University, Busandaehak-ro 63 beon-gil 2, Geumjeong-gu, Busan 46241, Korea.

作者： Joon Hyub,Kim ^[1] ; Ji-Hoon,Han ^[2] ; Chan Won,Park ^[3] ; Nam Ki,Min ^[2]

作者单位： Department of Nanomechatronics Engineering, Pusan National University, Busandaehak-ro 63 beon-gil 2, Geumjeong-gu, Busan 46241, Korea. ^[1] Department of Control and Instrumentation Engineering, Korea University, Sejong-ro, Jochiwon-eup, Sejong-si 30019, Korea. ^[2] Department of Electrical and Electronics Engineering, Kangwon National University, Gangwondaehak-gil, Chuncheon-si 24341, Korea. ^[3]

关键词 alkali-free glass high withstand voltage micro-electromechanical system (MEMS)piezoresistive sensor silicon strain gauge

DOI 10.3390/s20113024

PMID 32466606

发布时间 2020-06-26

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