Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film.

导出 LinkOut

翻译打印收藏纠错

第一作者： Eunjung,Shin

第一单位： Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea.

作者： Eunjung,Shin ^[1] ; Hong Goo,Yeo ^[2] ; Ara,Yeon ^[3] ; Changzhu,Jin ^[1] ; Wonki,Park ^[3] ; Sung-Chul,Lee ^[4] ; Hongsoo,Choi ^[4]

作者单位： Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea. ^[1] DGIST-ETH Microrobotics Research Center (DE-MRC), Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea. ^[2] DGIST Robotics Research Center, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea. ^[3] SoC Platform Research Center, Korea Electronics Technology Institute (KETI), Seongnam-si 13509, Korea. ^[4]

关键词 aluminum nitride piezoelectric micromachined ultrasonic transducer (pMUT)two- dimensional (2D) array

DOI 10.3390/mi11060623

PMID 32604827

发布时间 2020-09-28

翻译满意度评价：

准确一般字义偏差语意偏离译文作用小提交

浏览2

Micromachines

2020年11卷6期

相似文献

中文期刊
外文期刊
学位论文
会议论文

检索历史清除

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film.

Micromachines

相似文献

Micromachines

相关期刊

参考文献：
指定格式：	NoteExpress EndNote RefWorks NoteFirst

检索历史 清除

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film.

Micromachines

相似文献

Micromachines

相关期刊

检索历史清除