Design, Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure.

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作者： Cheng,Li ^[1] ; Bo,Yang ^[2] ; Xin,Guo ^[1] ; Xinru,Chen ^[2]

作者单位： School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China. ^[1] Key Laboratory of Micro-Inertial Instruments and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China. ^[2]

关键词 MEMS gyroscope differential detection planar multi-turn micro-coil tunneling magnetoresistance

DOI 10.3390/s20174919

PMID 32878100

发布时间 2020-10-01

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Sensors (Basel, Switzerland)

2020年20卷17期

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Design, Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure.

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Design, Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure.

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