Resonant-type piezoelectric inertial drive mechanism with asymmetric inertial masses.

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第一作者： Chengliang,Pan

第一单位： School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, Anhui 230009, China.

作者： Chengliang,Pan ^[1] ; Chao,Shi ^[1] ; Anhui,Feng ^[1] ; Mingang,Hu ^[1] ; Shuangbao,Shu ^[1] ; Haojie,Xia ^[1]

作者单位： School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei, Anhui 230009, China. ^[1]

DOI 10.1063/5.0030775

PMID 33514217

发布时间 2021-02-03

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The Review of scientific instruments

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