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Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester.

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第一作者： Xianming,He

第一单位： Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education, Chongqing University, Chongqing 400044, China.;International R & D Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.

作者： Xianming,He ^[1] ; Dongxiao,Li ^[1] ; Hong,Zhou ^[1] ; Xindan,Hui ^[1] ; Xiaojing,Mu ^[1]

作者单位： Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education, Chongqing University, Chongqing 400044, China.;International R & D Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China. ^[1]

关键词 AlN MEMS coupled distributed parameter dynamics model piezoelectric vibration energy harvester trapezoidal cantilever beam variable cross-section cantilever beam

DOI 10.3390/mi12070772

PMID 34208991

发布时间 2021-07-27

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2021年12卷7期

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Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester.

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