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A Miniature Four-Channel Ion Trap Array Based on Non-silicon MEMS Technology.

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第一作者： Qi,Zhang

第一单位： National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.;Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.

作者： Qi,Zhang ^[1] ; Xichi,Lu ^[1] ; Ting,Chen ^[1] ; Yu,Xiao ^[2] ; Rujiao,Yao ^[2] ; Jinyuan,Yao ^[3]

作者单位： National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China.;Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China. ^[1] Institute of Spacecraft Equipment, Shanghai 200240, China. ^[2] National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China. ^[3]

关键词 MEMS mass spectrometry miniature four-channel ion trap array (MFITA)

DOI 10.3390/mi12070831

PMID 34357241

发布时间 2021-08-09

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2021年12卷7期

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