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Cost-Effective Fabrication of Fractal Silicon Nanowire Arrays.

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第一作者： Antonio Alessio,Leonardi

第一单位： Dipartimento di Fisica e Astronomia "Ettore Majorana", Università di Catania, Via Santa Sofia 64, 95123 Catania, Italy.;CNR-IPCF, Istituto per i Processi Chimico-Fisici, Viale F. Stagno D'Alcontres 37, 98158 Messina, Italy.;CNR-IMM UoS Catania, Istituto per la Microelettronica e Microsistemi, Via Santa Sofia 64, 95025 Catania, Italy.

作者： Antonio Alessio,Leonardi ^[1] ; Maria José,Lo Faro ^[2] ; Maria,Miritello ^[3] ; Paolo,Musumeci ^[4] ; Francesco,Priolo ^[4] ; Barbara,Fazio ^[5] ; Alessia,Irrera ^[5]

作者单位： Dipartimento di Fisica e Astronomia "Ettore Majorana", Università di Catania, Via Santa Sofia 64, 95123 Catania, Italy.;CNR-IPCF, Istituto per i Processi Chimico-Fisici, Viale F. Stagno D'Alcontres 37, 98158 Messina, Italy.;CNR-IMM UoS Catania, Istituto per la Microelettronica e Microsistemi, Via Santa Sofia 64, 95025 Catania, Italy. ^[1] Dipartimento di Fisica e Astronomia "Ettore Majorana", Università di Catania, Via Santa Sofia 64, 95123 Catania, Italy.;CNR-IMM UoS Catania, Istituto per la Microelettronica e Microsistemi, Via Santa Sofia 64, 95025 Catania, Italy. ^[2] CNR-IMM UoS Catania, Istituto per la Microelettronica e Microsistemi, Via Santa Sofia 64, 95025 Catania, Italy. ^[3] Dipartimento di Fisica e Astronomia "Ettore Majorana", Università di Catania, Via Santa Sofia 64, 95123 Catania, Italy. ^[4] CNR-IPCF, Istituto per i Processi Chimico-Fisici, Viale F. Stagno D'Alcontres 37, 98158 Messina, Italy. ^[5]

关键词 MACE metal-assisted chemical etching erbium fractal photonics silicon nanowires

DOI 10.3390/nano11081972

PMID 34443803

发布时间 2021-08-31

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Nanomaterials (Basel, Switzerland)

2021年11卷8期

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Cost-Effective Fabrication of Fractal Silicon Nanowire Arrays.

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Cost-Effective Fabrication of Fractal Silicon Nanowire Arrays.

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