Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles.

导出 OA

翻译打印收藏纠错

作者： Changhe,Sun ^[1] ; Yufei,Liu ^[2] ; Bolun,Li ^[3] ; Wenqu,Su ^[3] ; Mingzhang,Luo ^[1] ; Guofeng,Du ^[1] ; Yaming,Wu ^[1]

作者单位： School of Electronics and Information, Yangtze University, Jingzhou 434023, China. ^[1] Cooperative Innovation Center of Unconventional Oil and Gas, Yangtze University, Ministry of Education, Wuhan 430100, China. ^[2] Key Laboratory of Optoelectronic Technology & Systems, Chongqing University, Ministry of Education, Chongqing 400044, China. ^[3] State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China. ^[4]

关键词 MEMS scanning mirror ScAlN piezoelectric actuator rotation transformation static tilting angle

DOI 10.3390/s21165513

PMID 34450955

发布时间 2021-08-31

翻译满意度评价：

准确一般字义偏差语意偏离译文作用小提交