Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas.

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作者： Stefan,Ries ^[1] ; Manuel,Schroeder ^[1] ; Marc,Woestefeld ^[1] ; Carles,Corbella ^[2] ; Ihor,Korolov ^[1] ; Peter,Awakowicz ^[1] ; Julian,Schulze ^[1]

作者单位： Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum, Universitaetsstraße 150, D-44780 Bochum, Germany. ^[1] Chair for Experimental Physics II, Ruhr University Bochum, Universitaetsstraße 150, D-44780 Bochum, Germany. ^[2]

DOI 10.1063/5.0059658

PMID 34717414

发布时间 2021-10-31

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The Review of scientific instruments

2021年92卷10期

103503页

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Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas.

The Review of scientific instruments

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The Review of scientific instruments

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Relative calibration of a retarding field energy analyzer sensor array for spatially resolved measurements of the ion flux and ion energy in low temperature plasmas.

The Review of scientific instruments

相似文献

The Review of scientific instruments

相关期刊

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