Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer.

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第一作者： Yu,Feng

第一单位： Key Laboratory of Low Altitude Monitoring Network Technology, QiLu Aerospace Information Research Institute, Jinan 250101, China.

作者： Yu,Feng ^[1] ; Wuhao,Yang ^[2] ; Xudong,Zou ^[3]

作者单位： Key Laboratory of Low Altitude Monitoring Network Technology, QiLu Aerospace Information Research Institute, Jinan 250101, China. ^[1] State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China. ^[2] Key Laboratory of Low Altitude Monitoring Network Technology, QiLu Aerospace Information Research Institute, Jinan 250101, China.;State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.;School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China. ^[3]

关键词 displacement detection micro-opto-electro-mechanical system optical mode localization suspended directional coupler

DOI 10.3390/mi14010039

PMID 36677100

发布时间 2023-02-01

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2022年14卷1期

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Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer.

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Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer.

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