Laser-Induced Transient Self-Organization of TiN<sub>x</sub> Nano-Filament Percolated Networks for High Performance Surface-Mountable Filter Capacitors.

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第一作者： Fangcheng,Wang

第一单位： Institute of Materials Research, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, P. R. China.;Shenzhen Institute of Advanced Electronic Materials-Shenzhen Fundamental Research Institutions, Shenzhen Institute of Advanced Technology Chinese Academy of Sciences, Shenzhen, 518055, P. R. China.

作者： Fangcheng,Wang ^[1] ; Zhenbin,Guo ^[2] ; Zhiyuan,Wang ^[3] ; Haojie,Zhu ^[3] ; Guangyao,Zhao ^[3] ; Chaojie,Chen ^[3] ; Mingjie,Liu ^[3] ; Rong,Sun ^[4] ; Feiyu,Kang ^[3] ; Ching-Ping,Wong ^[5] ; Cheng,Yang ^[3]

作者单位： Institute of Materials Research, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, P. R. China.;Shenzhen Institute of Advanced Electronic Materials-Shenzhen Fundamental Research Institutions, Shenzhen Institute of Advanced Technology Chinese Academy of Sciences, Shenzhen, 518055, P. R. China. ^[1] Institute of Semiconductor Manufacturing Research, Shenzhen University, Shenzhen, Guangdong, 518060, P. R. China. ^[2] Institute of Materials Research, Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, 518055, P. R. China. ^[3] Shenzhen Institute of Advanced Electronic Materials-Shenzhen Fundamental Research Institutions, Shenzhen Institute of Advanced Technology Chinese Academy of Sciences, Shenzhen, 518055, P. R. China. ^[4] School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, 30332, USA. ^[5]

关键词 TiN x nanonetworks laser-induced transient self-organization surface-mountable filter capacitors ultrafine nano-filaments

DOI 10.1002/adma.202210038

PMID 36688671

发布时间 2023-04-13

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