An ultra-high vacuum system for fabricating clean two-dimensional material devices.

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第一作者： Shuaifei,Guo

第一单位： State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China.

作者： Shuaifei,Guo ^[1] ; Mingyan,Luo ^[1] ; Gang,Shi ^[2] ; Ning,Tian ^[1] ; Zhe,Huang ^[3] ; Fangyuan,Yang ^[1] ; Liguo,Ma ^[1] ; Nai Zhou,Wang ^[4] ; Qinzhen,Shi ^[5] ; Kailiang,Xu ^[5] ; Zihan,Xu ^[6] ; Kenji,Watanabe ^[7] ; Takashi,Taniguchi ^[8] ; Xian Hui,Chen ^[4] ; Dawei,Shen ^[3] ; Liyuan,Zhang ^[2] ; Wei,Ruan ^[1] ; Yuanbo,Zhang ^[1]

作者单位： State Key Laboratory of Surface Physics and Department of Physics, Fudan University, Shanghai 200438, China. ^[1] Department of Physics, Southern University of Science and Technology, 518055 Shenzhen, China. ^[2] State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai 200050, China. ^[3] Hefei National Laboratory for Physical Science at Microscale and Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China. ^[4] Center for Biomedical Engineering, Fudan University, Shanghai 200438, China. ^[5] SixCarbon Technology, Youmagang Industry Park, Shenzhen 518106, China. ^[6] Research Center for Functional Materials, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan. ^[7] International Center for Materials Nanoarchitectonics, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan. ^[8]

DOI 10.1063/5.0110875

PMID 36725600

发布时间 2023-02-02

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The Review of scientific instruments

2023年94卷1期

013903页

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An ultra-high vacuum system for fabricating clean two-dimensional material devices.

The Review of scientific instruments

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The Review of scientific instruments

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An ultra-high vacuum system for fabricating clean two-dimensional material devices.

The Review of scientific instruments

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The Review of scientific instruments

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