An integrated ultra-high vacuum cluster for atomic-scale deposition, interface regulation, and characterization of spintronic multilayers.

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作者： Houyi,Cheng ^[1] ; Boyu,Zhang ^[2] ; Sylvain,Eimer ^[3] ; Yongshan,Liu ^[1] ; Yong,Xu ^[2] ; Pierre,Vallobra ^[2] ; Zilu,Wang ^[3] ; Cheng,Li ^[1] ; Jiyao,Ge ^[2] ; Renyou,Xu ^[1] ; Yuxuan,Yao ^[2] ; Xinran,Wang ^[2] ; Yinchang,Du ^[1] ; Xueying,Zhang ^[2] ; Yue,Zhang ^[3] ; Chao,Zhao ^[2] ; Weisheng,Zhao ^[3]

作者单位： MIIT Key Laboratory of Spintronics, School of Integrated Circuit Science and Engineering, Beihang University, Beijing 100191, China. ^[1] Hefei Innovation Research Institute, Anhui High Reliability Chips Engineering Laboratory, Beihang University, Hefei 230013, China. ^[2] Truth Equipment Corporation, TREC, Hefei 230013, China. ^[3] Truth Instrument Co., Ltd., Qingdao 266000, China. ^[4] Beihang Hangzhou Innovation Institute (Yuhang), Beihang University, Hangzhou 311121, China. ^[5] Beijing Superstring Academy of Memory Technology, Beijing 100176, China. ^[6]

DOI 10.1063/5.0150855

PMID 37432097

发布时间 2023-07-18

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The Review of scientific instruments

2023年94卷7期

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An integrated ultra-high vacuum cluster for atomic-scale deposition, interface regulation, and characterization of spintronic multilayers.

The Review of scientific instruments

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The Review of scientific instruments

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An integrated ultra-high vacuum cluster for atomic-scale deposition, interface regulation, and characterization of spintronic multilayers.

The Review of scientific instruments

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The Review of scientific instruments

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