Scanning Electrochemical Probe Lithography for Ultra-Precision Machining of Micro-Optical Elements with Freeform Curved Surface.

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作者： Hantao,Xu ^[1] ; Lianhuan,Han ^[1] ; Jianan,Huang ^[1] ; Bingqian,Du ^[1] ; Dongping,Zhan ^[1]

作者单位： Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science and Technology, State Key Laboratory of Physical Chemistry of Solid Surfaces (PCOSS), Fujian Science & Technology Innovation Laboratory for Energy Materials of China, Engineering Research Center of Electrochemical Technologies of Ministry of Education, Department of Chemistry, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen, 361005, China. ^[1]

关键词 electrochemical machining freeform curved surface micro‐optical elements scanning electrochemical probe microscopy ultra‐precision machining

DOI 10.1002/smll.202402743

PMID 38940401

发布时间 2024-10-24

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