Dynamics of ionized poly(4-hydroxystyrene)-type resist polymers with tert-butoxycarbonyl-protecting group.

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第一作者： Kazumasa,Okamoto

第一单位： SANKEN (The Institute of Scientific and Industrial Research), Osaka University, Ibaraki, Osaka, 567-0047, Japan. kazu@sanken.osaka-u.ac.jp.;Artificial Intelligence Research Center, SANKEN (AIRC-SANKEN), Osaka University, Ibaraki, Osaka, 567-0047, Japan. kazu@sanken.osaka-u.ac.jp.

作者： Kazumasa,Okamoto ^[1] ; Yusa,Muroya ^[2] ; Takahiro,Kozawa ^[2]

作者单位： SANKEN (The Institute of Scientific and Industrial Research), Osaka University, Ibaraki, Osaka, 567-0047, Japan. kazu@sanken.osaka-u.ac.jp.;Artificial Intelligence Research Center, SANKEN (AIRC-SANKEN), Osaka University, Ibaraki, Osaka, 567-0047, Japan. kazu@sanken.osaka-u.ac.jp. ^[1] SANKEN (The Institute of Scientific and Industrial Research), Osaka University, Ibaraki, Osaka, 567-0047, Japan. ^[2]

关键词 Chemically amplified resist Density functional theory Deprotonation Pulse radiolysis Radical cation

DOI 10.1038/s41598-024-67794-0

PMID 39030395

发布时间 2024-07-27

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