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Advanced Mechanical Transfer of Micro-LEDs Enabled by Structurally Modified Wide Sapphire Nanomembranes through Thermal Reflow of Photoresist.

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第一作者： Sohyeon,Park

第一单位： Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul 08826, Republic of Korea.

作者： Sohyeon,Park ^[1] ; Jung-El,Ryu ^[2] ; Tae-Hyun,Kim ^[1] ; Hyuk Jin,Kim ^[1] ; Jeewon,Bu ^[1] ; Sung Jin,Seo ^[1] ; Ji Hyun,Baek ^[1] ; Young Joon,Hong ^[3] ; Sang-Wan,Ryu ^[4] ; Yongjo,Park ^[5] ; Myoung-Gyu,Lee ^[1] ; Ho Won,Jang ^[5]

作者单位： Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul 08826, Republic of Korea. ^[1] Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul 08826, Republic of Korea.;Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States. ^[2] Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 05006, Republic of Korea. ^[3] Department of Physics, Chonnam National University, Gwangju 61186, Republic of Korea. ^[4] Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul 08826, Republic of Korea.;Advanced Institute of Convergence Technology, Seoul National University, Suwon 16229, Republic of Korea. ^[5]

关键词 GaN mechanical transfer micro-LEDs sapphire nanomembranes thermal reflow

DOI 10.1021/acsami.4c05958

PMID 39099087

发布时间 2024-08-15

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