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Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum-Silicon Hybrid Structures.

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第一作者： Min,Li

第一单位： School of Integrated Circuits, Nanjing University of Information Science and Technology, Nanjing 210044, China.;Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology, Nanjing University of Information Science and Technology, Nanjing 210044, China.

作者： Min,Li ^[1] ; Yang,Xiao ^[2] ; Jiahong,Zhang ^[1] ; Qingquan,Liu ^[1] ; Xianglong,Jiang ^[1] ; Wenhao,Hua ^[1]

作者单位： School of Integrated Circuits, Nanjing University of Information Science and Technology, Nanjing 210044, China.;Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology, Nanjing University of Information Science and Technology, Nanjing 210044, China. ^[1] School of Integrated Circuits, Nanjing University of Information Science and Technology, Nanjing 210044, China. ^[2]

关键词 MEMS aluminum–silicon hybrid structures sensor array

DOI 10.3390/mi15091065

PMID 39337725

发布时间 2024-09-30

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2024年15卷9期

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Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum-Silicon Hybrid Structures.

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Development of Highly Sensitive and Thermostable Microelectromechanical System Pressure Sensor Based on Array-Type Aluminum-Silicon Hybrid Structures.

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