Dual-control of incubation effect for efficiently fabricating surface structures in fused silica.

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第一作者： Zhi,Wang

第一单位： Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing 100081, China.

作者： Zhi,Wang ^[1] ; Zhikun,Xiang ^[1] ; Xiaowei,Li ^[1] ; Mengnan,Wu ^[2] ; Peng,Yi ^[1] ; Chao,Zhang ^[1] ; Yihao,Yan ^[1] ; Xibiao,Li ^[1] ; Xiangyu,Zhang ^[1] ; Andong,Wang ^[1] ; Lingling,Huang ^[3]

作者单位： Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, No. 5, South Street, Zhongguancun, Beijing 100081, China. ^[1] Aviation Key Laboratory of Science and Technology on Advanced Corrosion and Protection for Aviation Material, AECC Beijing Institute of Aeronautical Materials, Beijing 100095, China. ^[2] School of Optics and Photonics, Beijing Institute of Technology, Beijing, 100081, China. ^[3]

关键词 efficient etching femtosecond laser incubation effect surface structure

DOI 10.1515/nanoph-2024-0324

PMID 39634954

发布时间 2024-12-07

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Nanophotonics (Berlin, Germany)

2024年13卷21期

4057-4065页

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Dual-control of incubation effect for efficiently fabricating surface structures in fused silica.

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Dual-control of incubation effect for efficiently fabricating surface structures in fused silica.

Nanophotonics (Berlin, Germany)

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