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Growth-based monolithic 3D integration of single-crystal 2D semiconductors.

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第一作者: Ki Seok,Kim
第一单位: Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA.;Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA.
作者单位: Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA.;Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA. [1] 2D Device Laboratory, Samsung Advanced Institute of Technology, Suwon, Korea.;Device Research Center, Samsung Advanced Institute of Technology, Suwon, Korea. [2] Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA.;Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA. [3] Department of Electrical and Computer Engineering Sungkyunkwan University, Suwon-si, South Korea. [4] Department of Materials Science and Engineering, The University of Texas at Dallas, Richardson, TX, USA. [5] 2D Device Laboratory, Samsung Advanced Institute of Technology, Suwon, Korea. minsu.seol@samsung.com.;Device Research Center, Samsung Advanced Institute of Technology, Suwon, Korea. minsu.seol@samsung.com. [6] Department of Electrical and Computer Engineering Sungkyunkwan University, Suwon-si, South Korea. jhpark9@skku.edu.;SKKU Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Suwon-si, South Korea. jhpark9@skku.edu. [7] 2D Device Laboratory, Samsung Advanced Institute of Technology, Suwon, Korea. swon80.kim@samsung.com.;Device Research Center, Samsung Advanced Institute of Technology, Suwon, Korea. swon80.kim@samsung.com. [8] Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA. jeehwan@mit.edu.;Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA. jeehwan@mit.edu.;2D Device Laboratory, Samsung Advanced Institute of Technology, Suwon, Korea. jeehwan@mit.edu.;Device Research Center, Samsung Advanced Institute of Technology, Suwon, Korea. jeehwan@mit.edu.;Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA. jeehwan@mit.edu. [9]
DOI 10.1038/s41586-024-08236-9
PMID 39695208
发布时间 2024-12-26
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