Evolution of Chemical, Structural, and Mechanical Properties of Titanium Nitride Films with Different Thicknesses Fabricated Using Pulsed DC Magnetron Sputtering.

导出 OA

翻译打印收藏纠错

作者： Wei,Mao ^[1] ; Runze,Qi ^[2] ; Jiali,Wu ^[1] ; Zhe,Zhang ^[1] ; Zhanshan,Wang ^[1]

作者单位： MOE Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering (IPOE), School of Physics Science and Engineering, Tongji University, Shanghai 200092, China. ^[1] MOE Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering (IPOE), School of Physics Science and Engineering, Tongji University, Shanghai 200092, China.;Zhejiang Tongyue Optical Technology Co., Ltd., Taizhou 318013, China. ^[2]

关键词 chemical composition intrinsic stress microstructure roughness titanium nitride

DOI 10.3390/ma17246067

PMID 39769666

发布时间 2025-01-08

翻译满意度评价：

准确一般字义偏差语意偏离译文作用小提交