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Nanofabrication for Nanophotonics.

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第一作者: Younghwan,Yang
第一单位: Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
作者单位: Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea. [1] Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), Singapore 138634, Singapore.;Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore.;Singapore University of Technology and Design, Singapore 487372, Singapore. [2] Singapore University of Technology and Design, Singapore 487372, Singapore. [3] Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea. [4] Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea. [5] fourth Physics Institute and Research Center SCoPE, University of Stuttgart, Stuttgart 70569, Germany. [6] RIKEN Center for Advanced Photonics, Wako 351-0198, Japan.;Institute of Post-LED Photonics, Tokushima University, Tokushima 770-8501, Japan. [7] Department of Electrical and Computer Engineering, Grainger College of Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States. [8] Chair in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität, Munich 80539, Germany. [9] School of Physics and Astronomy, Monash University, Clayton, VIC 3800, Australia.;Department of Physics, Imperial College London, London SW72AZ, United Kingdom. [10] School of Physics and Astronomy, Monash University, Clayton, VIC 3800, Australia. [11] Department of Creative Convergence Engineering, Hanbat National University, Daejeon, 34158, Republic of Korea. [12] Global Frontier Center for Multiscale Energy Systems, Seoul National University, Seoul 08826, Republic of Korea.;Department of Mechanical Engineering, Seoul National University, Seoul 08826, Republic of Korea. [13] Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea. [14] Department of Biophysics, Sungkyunkwan University, Suwon 16419, Republic of Korea.;Department of Intelligent Precision Healthcare Convergence, Sungkyunkwan University, Suwon 16419, Republic of Korea. [15] NanoScience Technology Center, University of Central Florida, Florida 32826, United States. [16] NanoScience Technology Center, University of Central Florida, Florida 32826, United States.;Department of Physics, University of Central Florida, Florida 32816, United States.;The College of Optics and Photonics, University of Central Florida, Orlando, Florida 32816, United States. [17] Second Physics Institute, University of Stuttgart Pfaffenwaldring 57, Stuttgart 70569, Germany.;Max Planck Institute for Solid State Research, Heisenbergstrasse 1, Stuttgart D-70569, Germany. [18] Faculty of Physics and Center for NanoScience (CeNS) Ludwig-Maxim8ilians-University, Munich 80539, Germany.;Skolkovo Institute of Science and Technology, Moscow 121205, Russia. [19] Faculty of Physics and Center for NanoScience (CeNS) Ludwig-Maxim8ilians-University, Munich 80539, Germany. [20] Department of Chemistry, Seoul National University, Seoul 08826, Republic of Korea. [21] Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States. [22] Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea. [23] Max Planck Institute for Medical Research, Heidelberg 69120, Germany.;Institute for Molecular Systems Engineering and Advanced Materials, Heidelberg University, Heidelberg 69120, Germany. [24] School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Gwangju, 61005, Republic of Korea. [25] Max Planck Institute for Medical Research, Heidelberg 69120, Germany.;Institute for Molecular Systems Engineering and Advanced Materials, Heidelberg University, Heidelberg 69120, Germany.;Center for Nanomedicine, Institute for Basic Science (IBS), Seoul 03722, Republic of Korea.;Department of Nano Biomedical Engineering (NanoBME), Yonsei University, Seoul, 03722, Republic of Korea. [26] Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea. [27] Department of Biomedical Engineering, Yonsei University, Wonju 26493, Republic of Korea. [28] Institute of Materials Science of Barcelona (ICMAB-CSIC), Bellaterra, 08193 Spain. [29] Digital Health Care R&D Department, Korea Institute of Industrial Technology (KITECH), Cheonan 31056, Republic of Korea. [30] Department of Materials Science and Engineering, University of Illinois, Urbana-Champaign, Illinois 61801, United States. [31] Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea. [32] Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany.;Faculty of Chemistry and Food Chemistry, Technische Universität Dresden, Dresden 01069, Germany.;Dresden Center for Intelligent Materials (DCIM), Technische Universität Dresden, Dresden 01069, Germany.;Department of Polymers, University of Chemistry and Technology Prague, Prague 6 166 28, Czech Republic. [33] Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany.;Faculty of Chemistry and Food Chemistry, Technische Universität Dresden, Dresden 01069, Germany.;Dresden Center for Intelligent Materials (DCIM), Technische Universität Dresden, Dresden 01069, Germany.;Center for Advancing Electronics Dresden (cfaed), Technische Universität Dresden, Dresden 01069, Germany. [34] Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany.;Center for Advancing Electronics Dresden (cfaed), Technische Universität Dresden, Dresden 01069, Germany.;Physical Chemistry of Polymeric Materials, Technische Universität Dresden, Dresden 01069, Germany. [35] Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.;International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States.;Department of Chemistry and Biochemistry, University of Maryland, College Park, Mayland 20742, United States. [36] International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States.;Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States. [37] Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.;International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States.;Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States. [38] Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States. [39] Center for Quantum Information, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea.;Division of Quantum Information, KIST School, Korea University of Science and Technology, Seoul 02792, Republic of Korea. [40] Center for Quantum Information, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea. [41] School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, Australia.;ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, Australia. [42] Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.;Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.;Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.;POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics, Pohang 37673, Republic of Korea. [43]
DOI 10.1021/acsnano.4c10964
PMID 40152322
发布时间 2025-04-08
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ACS nano

ACS nano

2025年19卷13期

12491-12605页

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