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Atomic lift-off of epitaxial membranes for cooling-free infrared detection.

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第一作者: Xinyuan,Zhang
第一单位: Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA.
作者单位: Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA. [1] Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, WI, USA. [2] Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA. [3] Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA. [4] Department of Chemistry, Massachusetts Institute of Technology, Cambridge, MA, USA. [5] Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA, USA.;Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, USA. [6] Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA, USA. [7] Department of Mechanical Engineering, University of Louisville, Louisville, KY, USA. [8] Department of Electrical and Computer Engineering, University of Illinois Urbana-Champaign, Urbana, IL, USA. [9] Department of Electrical and Electronic Engineering, Yonsei University, Seoul, Republic of Korea. [10] Department of Physics and Astronomy, Seoul National University, Seoul, Republic of Korea. celesta@snu.ac.kr. [11] Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, NY, USA. shiy2@rpi.edu. [12] Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, WI, USA. ceom@wisc.edu. [13] Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA. jeehwan@mit.edu.;Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, USA. jeehwan@mit.edu.;Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA, USA. jeehwan@mit.edu.;Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, MA, USA. jeehwan@mit.edu. [14]
DOI 10.1038/s41586-025-08874-7
PMID 40269153
发布时间 2025-04-24
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