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Diamond Wire Wear and Its Effect on Surface Quality in Cutting of Monocrystalline Silicon.

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第一作者： Jinguang,Du

第一单位： Henan Provincial Key Laboratory of Intelligent Manufacturing of Mechanical Equipment, Zhengzhou University of Light Industry, Zhengzhou 450002, China.;Henan Province Engineering Technology Research Center of Green Manufacturing and Precision Measurement, Zhengzhou University of Light Industry, Zhengzhou 450002, China.

作者： Jinguang,Du ^[1] ; Yu,Wu ^[1] ; Zhen,Zhang ^[2] ; Yu,Zhang ^[1] ; Wenbin,He ^[1] ; Junxiao,Geng ^[1] ; Liuyang,Duan ^[1] ; Wuyi,Ming ^[3]

作者单位： Henan Provincial Key Laboratory of Intelligent Manufacturing of Mechanical Equipment, Zhengzhou University of Light Industry, Zhengzhou 450002, China.;Henan Province Engineering Technology Research Center of Green Manufacturing and Precision Measurement, Zhengzhou University of Light Industry, Zhengzhou 450002, China. ^[1] School of Aerospace Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.;Guangdong Provincial Key Laboratory of Digital Manufacturing Equipment, Guangdong HUST Industrial Technology Research Institute, Dongguan 523808, China. ^[2] Henan Provincial Key Laboratory of Intelligent Manufacturing of Mechanical Equipment, Zhengzhou University of Light Industry, Zhengzhou 450002, China.;Guangdong Provincial Key Laboratory of Digital Manufacturing Equipment, Guangdong HUST Industrial Technology Research Institute, Dongguan 523808, China. ^[3]

关键词 abrasive wear diamond wire saw (DWS)monocrystalline silicon surface roughness total thickness variation (TTV)

DOI 10.3390/ma18081768

PMID 40333422

发布时间 2025-05-09

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